Products

SEMITRON® Semiconductor Grade Products

Description:

The Semitron® Semiconductor Grade products were developed to help designers and users optimize the performance of device manufacturing equipment. In addition to device manufacture, many of these materials are ideal for specific environments where wear-resistance, chemical-resistance and the management of static electricity are required.

Two groups of products have been developed. One, well suited for device handling and test applications, and a second for next-generation CMP use.

Grades:

Semitron® CMP Materials
The Semitron® CMP product line was developed to give new tool designers and forward-thinking end users an opportunity to increase the number of devices successfully produced per wafer while decreasing the cost of consumables per device. This is achieved by increasing the service life of the retaining ring.

Grades: Applications:

Notes: It is important to know how applied voltage affects the resistance of a material. Some materials exhibit high resistance at low voltages, but when subjected to harsher conditions, they can fall. This is due to dielectric breakdown and is irreversible. This chart illustrates the effect of sequential applications of 100 through 1,000 volts, then a return to 100 volts to determine the hysteresis. Since static electricity can be several thousand volts, consistent performance across the voltage range must be considered. Some materials are very inconsistent and vary on the “grain” of machining. One pair of lines illustrate the typical variation from side to side (A to B) of the same sample. This example demonstrates the need for consistent behavior in service.